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Optical Microlithography XI: 25-27 February, 1998, Santa Clara, California (Proceedings of Spie--the International Society for Optical Engineering, V. 3334.)
by Sematech (Organization)
Binding: Paperback, 1090 pages
Publisher: SPIE-International Society for Optical Engine
Weight: 0 pound
ISBN 10: 0819427799
ISBN 13: 9780819427793
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