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    Chemical Physics of Thin Film Deposition Processes for Micro- And Nano-Technologies
    by Editor: Y. Pauleau

    Binding: Paperback
    Publisher: Kluwer Academic Pub
    Published Date: 04/01/2002
    List Price: USD $83.95
    Weight: 1.35 pounds
    1402005253
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    Chemical Physics of Thin Film Deposition Processes for Micro- And Nano-Technologies - by Y. Pauleau - Hardcover - List $229.00

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