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1. Microlithography and Metrology in Micromachining 23 24 October 1995: 23-24 October, 1995, Austin, Texas

Author: Society of Photo-Optical Instrumentation Engineers - Author: National Institute of Standards and Technology (U.S.) - Author: Michael T. Postek - Author: Semiconductor Equipment and Materials Institute - E :

ISBN: 0819420069
ISBN13: 9780819420060
Binding: Paperback
List Price: $66.0
Publisher: Society of Photo Optical
Published Date: 09/01/1995